Inventor
FISHER MATTHEW L
US7 patents
⚠️ This page may combine multiple inventors who share the name “FISHER MATTHEW L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR LIQUIDE AMERICA L P
5 patentsUS7087564B2Aug 8, 2006
Acidic chemistry for post-CMP cleaning
AIR LIQUIDE AMERICA L P23 citations92
US6762832B2Jul 13, 2004
Methods and systems for controlling the concentration of a component in a composition with absorption spectroscopy
AIR LIQUIDE AMERICA L P25 citations92
US7435712B2Oct 14, 2008
Alkaline chemistry for post-CMP cleaning
AIR LIQUIDE AMERICA L P13 citations83
US7297670B2Nov 20, 2007
Acidic chemistry for Post-CMP cleaning using a composition comprising mercaptopropionic acid
AIR LIQUIDE AMERICA L P3 citations62
US6749691B2Jun 15, 2004
Methods of cleaning discolored metallic arrays using chemical compositions
AIR LIQUIDE AMERICA L P6 citations62
AIR LIQUIDE ELECTRONICS US LP
2 patentsUS7498295B2Mar 3, 2009
Alkaline chemistry for post-CMP cleaning comprising tetra alkyl ammonium hydroxide
AIR LIQUIDE ELECTRONICS US LP14 citations83
US6943878B2Sep 13, 2005
Methods and systems for controlling the concentration of a component in a composition with absorption spectroscopy
AIR LIQUIDE ELECTRONICS US LP11 citations73