Inventor
ARMBRUST DOUGLAS S
US6 patents
Patents
6 patentsUS6610607B1Aug 26, 2003
Method to define and tailor process limited lithographic features using a modified hard mask process
IBM217 citations96
US6773952B2Aug 10, 2004
Semiconductor chip structures with embedded thermal conductors and a thermal sink disposed over opposing substrate surfaces
IBM45 citations95
US6251775B1Jun 26, 2001
Self-aligned copper silicide formation for improved adhesion/electromigration
IBM46 citations93
US6512292B1Jan 28, 2003
Semiconductor chip structures with embedded thermal conductors and a thermal sink disposed over opposing substrate surfaces
IBM34 citations92
US7094614B2Aug 22, 2006
In-situ monitoring of chemical vapor deposition process by mass spectrometry
IBM8 citations71
US6818992B1Nov 16, 2004
Self-aligned copper silicide formation for improved adhesion/electromigration
IBM3 citations59