Inventor

ACHTNIG JEFFERY WILLIAM

CA2 patents

⚠️ This page may combine multiple inventors who share the name “ACHTNIG JEFFERY WILLIAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

1 patent

US8055370B1Nov 8, 2011

Apparatus and methods for monitoring health of semiconductor process systems

NOVELLUS SYSTEMS INC23 citations86

ACHTNIG JEFFERY WILLIAM

1 patent

US8515568B1Aug 20, 2013

Apparatus and methods for monitoring health of semiconductor process systems

ACHTNIG JEFFERY WILLIAM3 citations50