Inventor
RAY ANDY
US6 patents
⚠️ This page may combine multiple inventors who share the name “RAY ANDY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
4 patentsUS8502173B2Aug 6, 2013
System and method for ion implantation with improved productivity and uniformity
AXCELIS TECH INC17 citations89
US11646175B2May 9, 2023
Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose control
AXCELIS TECH INC4 citations64
US8378313B2Feb 19, 2013
Uniformity of a scanned ion beam
AXCELIS TECH INC0 citations50
US9490185B2Nov 8, 2016
Implant-induced damage control in ion implantation
AXCELIS TECH INC0 citations34