Inventor

ZHENG LILY

US4 patents

⚠️ This page may combine multiple inventors who share the name “ZHENG LILY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US9865472B2Jan 9, 2018

Fabrication of a silicon structure and deep silicon etch with profile control

LAM RES CORP3 citations70

US7534363B2May 19, 2009

Method for providing uniform removal of organic material

LAM RES CORP3 citations60

CHEBI ROBERT

1 patent

US9330926B2May 3, 2016

Fabrication of a silicon structure and deep silicon etch with profile control

CHEBI ROBERT7 citations75

TERASTOR CORP

1 patent

US6462349B1Oct 8, 2002

Measuring spacing between two surfaces via evanescent coupling

TERASTOR CORP3 citations60