Inventor

BOGART JEFF

US3 patents

⚠️ This page may combine multiple inventors who share the name “BOGART JEFF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US6344105B1Feb 5, 2002

Techniques for improving etch rate uniformity

LAM RES CORP141 citations97

US9865472B2Jan 9, 2018

Fabrication of a silicon structure and deep silicon etch with profile control

LAM RES CORP3 citations70

CHEBI ROBERT

1 patent

US9330926B2May 3, 2016

Fabrication of a silicon structure and deep silicon etch with profile control

CHEBI ROBERT7 citations75