P

Inventor

OUDE NIJHUIS MARCO HENDRIKUS HERMANUS

NL7 patents
⚠️ This page may combine multiple inventors who share the name “OUDE NIJHUIS MARCO HENDRIKUS HERMANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BUTLER HANS

4 patents
US8730451B2May 20, 2014

Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping method

BUTLER HANS6 citations71
US9378722B2Jun 28, 2016

Lithographic apparatus with actuator to compensate acoustic vibration

BUTLER HANS6 citations70
US8553199B2Oct 8, 2013

Lithographic apparatus and device manufacturing method

BUTLER HANS6 citations70
US8243258B2Aug 14, 2012

Lithographic apparatus having acoustic resonator

BUTLER HANS5 citations60

ASML NETHERLANDS BV

2 patents
US9696630B2Jul 4, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations71
US10545414B2Jan 28, 2020

Vibration isolation system and lithographic apparatus

ASML NETHERLANDS BV0 citations41

VAN DER WIJST MARC WILHELMUS MARIA

1 patent
US9134632B2Sep 15, 2015

Lithographic apparatus and device manufacturing method

VAN DER WIJST MARC WILHELMUS MARIA3 citations58