Inventor
SEIJGER OLAV JOHANNES
NL6 patents
⚠️ This page may combine multiple inventors who share the name “SEIJGER OLAV JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIJGER OLAV JOHANNES
3 patentsUS8797509B2Aug 5, 2014
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
SEIJGER OLAV JOHANNES0 citations44
US8773640B2Jul 8, 2014
Inspection method and apparatus
SEIJGER OLAV JOHANNES1 citations44
US8922755B2Dec 30, 2014
Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substrates
SEIJGER OLAV JOHANNES0 citations34