Inventor
SAWATAISHI MASAYUKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SAWATAISHI MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS9735021B2Aug 15, 2017
Etching method
TOKYO ELECTRON LTD2 citations68
US12154790B2Nov 26, 2024
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD1 citations60
US11062881B2Jul 13, 2021
Plasma etching method and plasma processing device
TOKYO ELECTRON LTD0 citations50
US7256135B2Aug 14, 2007
Etching method and computer storage medium storing program for controlling same
TOKYO ELECTRON LTD1 citations50
US11688650B2Jun 27, 2023
Etching method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations43
US9735025B2Aug 15, 2017
Etching method
TOKYO ELECTRON LTD0 citations38
US9428838B2Aug 30, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations37