Inventor
MIMOTOGI AKIKO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MIMOTOGI AKIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
7 patentsUS6252651B1Jun 26, 2001
Exposure method and exposure apparatus using it
TOSHIBA KK10 citations74
US6107013AAug 22, 2000
Exposure method and exposure apparatus using it
TOSHIBA KK8 citations74
US6045981AApr 4, 2000
Method of manufacturing semiconductor device
TOSHIBA KK9 citations73
US5876885AMar 2, 1999
Profile simulation method, dependent on curvature of processed surface, and mask design method utilizing simulation
TOSHIBA KK7 citations73
US7985517B2Jul 26, 2011
Lithography simulation method, computer program product, and pattern forming method
TOSHIBA KK5 citations62
US7459264B2Dec 2, 2008
Device manufacturing method
TOSHIBA KK5 citations62
US9957630B2May 1, 2018
Pattern transfer mold and pattern formation method
TOSHIBA KK0 citations41
MIMOTOGI AKIKO
3 patentsUS8883373B2Nov 11, 2014
Method for manufacturing photo mask, method for manufacturing semiconductor device, and program
MIMOTOGI AKIKO2 citations60
US8081294B2Dec 20, 2011
Method of evaluating optical beam source of exposure device, method of designing illumination shape of exposure device, and software for optimizing illumination shape of exposure device
MIMOTOGI AKIKO2 citations59
US8230369B2Jul 24, 2012
Simulation method and simulation program
MIMOTOGI AKIKO0 citations39