Inventor

OOSTROM SJOERD

NL3 patents

Patents

3 patents

US8373343B2Feb 12, 2013

Optoelectric devices

TNO4 citations58

US10262853B2Apr 16, 2019

Removing particulate contaminants from the backside of a wafer or reticle

TNO0 citations42

US11536648B2Dec 27, 2022

Optical inspection device and method

TNO0 citations35