Inventor
KIM HYUNBAE
KR6 patents
⚠️ This page may combine multiple inventors who share the name “KIM HYUNBAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS12327712B2Jun 10, 2025
High voltage power supply apparatus and plasma etching equipment having the same
SAMSUNG ELECTRONICS CO LTD0 citations58
US11705306B2Jul 18, 2023
Variable frequency and non-sinusoidal power generator using double side cooling, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations50
US12002651B2Jun 4, 2024
Voltage waveform generator, wafer processing apparatus and plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations49