Inventor
SEKINE TAKETO
US7 patents
Patents
7 patentsUS9362186B2Jun 7, 2016
Polishing with eddy current feed meaurement prior to deposition of conductive layer
APPLIED MATERIALS INC10 citations83
US9811077B2Nov 7, 2017
Polishing with pre deposition spectrum
APPLIED MATERIALS INC2 citations72
US12576475B2Mar 17, 2026
Determining the orientation of a substrate in-situ
APPLIED MATERIALS INC0 citations62
US12106976B2Oct 1, 2024
Steam-assisted single substrate cleaning process and apparatus
APPLIED MATERIALS INC0 citations59
US11728185B2Aug 15, 2023
Steam-assisted single substrate cleaning process and apparatus
APPLIED MATERIALS INC1 citations59
US10651098B2May 12, 2020
Polishing with measurement prior to deposition of outer layer
APPLIED MATERIALS INC0 citations51
US12214468B2Feb 4, 2025
Temperature control of chemical mechanical polishing
APPLIED MATERIALS INC0 citations50