Inventor
SETTLES E DERRYCK
US5 patents
Patents
5 patentsUS6709557B1Mar 23, 2004
Sputter apparatus for producing multi-component metal alloy films and method for making the same
NOVELLUS SYSTEMS INC87 citations97
US6319842B1Nov 20, 2001
Method of cleansing vias in semiconductor wafer having metal conductive layer
NOVELLUS SYSTEMS INC56 citations93
US6525829B1Feb 25, 2003
Method and apparatus for in-situ measurement of thickness of copper oxide film using optical reflectivity
NOVELLUS SYSTEMS INC51 citations92
US6607982B1Aug 19, 2003
High magnesium content copper magnesium alloys as diffusion barriers
NOVELLUS SYSTEMS INC51 citations90
US6461155B1Oct 8, 2002
Method and apparatus for heating substrates in supercritical fluid reactor
NOVELLUS SYSTEMS INC20 citations90