Inventor
NAM DONG-SEOK
KR14 patents
⚠️ This page may combine multiple inventors who share the name “NAM DONG-SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
9 patentsUS6723607B2Apr 20, 2004
Method of forming fine patterns of semiconductor device
SAMSUNG ELECTRONICS CO LTD64 citations95
US6835970B2Dec 28, 2004
Semiconductor device having self-aligned contact pads and method for manufacturing the same
SAMSUNG ELECTRONICS CO LTD13 citations83
US10831095B2Nov 10, 2020
Critical dimension measurement system and method of measuring critical dimensions using same
SAMSUNG ELECTRONICS CO LTD2 citations68
US7956983B2Jun 7, 2011
Exposure equipment having auxiliary photo mask and exposure method using the same
SAMSUNG ELECTRONICS CO LTD2 citations61
US7139064B2Nov 21, 2006
Optical system for providing a hexapole illumination and method of forming a photoresist pattern on a substrate using the same
SAMSUNG ELECTRONICS CO LTD2 citations61
US11397380B2Jul 26, 2022
Critical dimension measurement system and method of measuring critical dimensions using same
SAMSUNG ELECTRONICS CO LTD0 citations58
US8865375B2Oct 21, 2014
Halftone phase shift blank photomasks and halftone phase shift photomasks
SAMSUNG ELECTRONICS CO LTD0 citations51
US8968970B2Mar 3, 2015
Phase shift masks and methods of forming phase shift masks
SAMSUNG ELECTRONICS CO LTD1 citations46
US8361679B2Jan 29, 2013
Phase shift masks
SAMSUNG ELECTRONICS CO LTD0 citations46