Inventor
GURUSAMY JAYAKUMAR
US11 patents
⚠️ This page may combine multiple inventors who share the name “GURUSAMY JAYAKUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6200199B1Mar 13, 2001
Chemical mechanical polishing conditioner
APPLIED MATERIALS INC46 citations95
US6361423B2Mar 26, 2002
Chemical mechanical polishing conditioner
APPLIED MATERIALS INC23 citations92
US6299511B1Oct 9, 2001
Chemical mechanical polishing conditioner
APPLIED MATERIALS INC15 citations92
US6033290AMar 7, 2000
Chemical mechanical polishing conditioner
APPLIED MATERIALS INC28 citations92
US6419559B1Jul 16, 2002
Using a purge gas in a chemical mechanical polishing apparatus with an incrementally advanceable polishing sheet
APPLIED MATERIALS INC28 citations91
US6659849B1Dec 9, 2003
Platen with debris control for chemical mechanical planarization
APPLIED MATERIALS INC10 citations74
US6951511B2Oct 4, 2005
Platen with peripheral frame for supporting a web of polishing material in a chemical mechanical planarization system
APPLIED MATERIALS INC6 citations72
US6482072B1Nov 19, 2002
Method and apparatus for providing and controlling delivery of a web of polishing material
APPLIED MATERIALS INC9 citations72
US6612914B2Sep 2, 2003
Platen with lateral web tensioner
APPLIED MATERIALS INC6 citations61