Inventor
ROSENBERG LAWRENCE M
US13 patents
⚠️ This page may combine multiple inventors who share the name “ROSENBERG LAWRENCE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS6251215B1Jun 26, 2001
Carrier head with a multilayer retaining ring for chemical mechanical polishing
APPLIED MATERIALS INC190 citations99
US6244935B1Jun 12, 2001
Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet
APPLIED MATERIALS INC178 citations99
US6413873B1Jul 2, 2002
System for chemical mechanical planarization
APPLIED MATERIALS INC85 citations97
US6200199B1Mar 13, 2001
Chemical mechanical polishing conditioner
APPLIED MATERIALS INC46 citations95
US6729944B2May 4, 2004
Chemical mechanical polishing apparatus with rotating belt
APPLIED MATERIALS INC24 citations92
US6379231B1Apr 30, 2002
Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet
APPLIED MATERIALS INC37 citations92
US6361423B2Mar 26, 2002
Chemical mechanical polishing conditioner
APPLIED MATERIALS INC23 citations92
US6299511B1Oct 9, 2001
Chemical mechanical polishing conditioner
APPLIED MATERIALS INC15 citations92
US6033290AMar 7, 2000
Chemical mechanical polishing conditioner
APPLIED MATERIALS INC28 citations92
US7303467B2Dec 4, 2007
Chemical mechanical polishing apparatus with rotating belt
APPLIED MATERIALS INC8 citations74
US6951511B2Oct 4, 2005
Platen with peripheral frame for supporting a web of polishing material in a chemical mechanical planarization system
APPLIED MATERIALS INC6 citations72
US6482072B1Nov 19, 2002
Method and apparatus for providing and controlling delivery of a web of polishing material
APPLIED MATERIALS INC9 citations72