P

Inventor

SOHMER ALEXANDER

DE5 patents
⚠️ This page may combine multiple inventors who share the name “SOHMER ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

3 patents
US6680803B2Jan 20, 2004

Partial objective in an illuminating systems

ZEISS CARL SMT AG15 citations82
US7130129B2Oct 31, 2006

Reticle-masking objective with aspherical lenses

ZEISS CARL SMT AG5 citations68
US7372634B2May 13, 2008

Reticle-masking objective with aspherical lenses

ZEISS CARL SMT AG0 citations48

ZEISS STIFTUNG

1 patent
US6683728B2Jan 27, 2004

Illumination system with reduced energy loading

ZEISS STIFTUNG2 citations59

SOHMER ALEXANDER

1 patent
US8873151B2Oct 28, 2014

Illumination system for a microlithgraphic exposure apparatus

SOHMER ALEXANDER0 citations39