Inventor
RICHARDS STEVEN
US12 patents
⚠️ This page may combine multiple inventors who share the name “RICHARDS STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBIS TECHNOLOGY CORP
4 patentsUS6794662B1Sep 21, 2004
Thermosetting resin wafer-holding pin
IBIS TECHNOLOGY CORP12 citations72
US6863736B2Mar 8, 2005
Shaft cooling mechanisms
IBIS TECHNOLOGY CORP10 citations70
US6815696B2Nov 9, 2004
Beam stop for use in an ion implantation system
IBIS TECHNOLOGY CORP5 citations61
US6661017B1Dec 9, 2003
Ion implantation system having an energy probe
IBIS TECHNOLOGY CORP4 citations61