Inventor

HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS

NL5 patents

⚠️ This page may combine multiple inventors who share the name “HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US9405205B2Aug 2, 2016

Lithographic apparatus and in-line cleaning apparatus

ASML NETHERLANDS BV16 citations91

US9785061B2Oct 10, 2017

Lithographic apparatus and in-line cleaning apparatus

ASML NETHERLANDS BV4 citations83

DE GRAAF ROELOF FREDERIK

2 patents

US8243255B2Aug 14, 2012

Lithographic apparatus and in-line cleaning apparatus

DE GRAAF ROELOF FREDERIK6 citations82

US9036128B2May 19, 2015

Lithographic apparatus and in-line cleaning apparatus

DE GRAAF ROELOF FREDERIK1 citations60

MARTENS ARJAN HUBRECHT JOSEF ANNA

1 patent

US8508711B2Aug 13, 2013

Lithographic apparatus and device manufacturing method

MARTENS ARJAN HUBRECHT JOSEF ANNA0 citations43