Inventor
SAKAI MAIKO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SAKAI MAIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
11 patentsUS5889335AMar 30, 1999
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP105 citations98
US6274457B1Aug 14, 2001
Method for manufacturing an isolation trench having plural profile angles
MITSUBISHI ELECTRIC CORP82 citations96
US6218262B1Apr 17, 2001
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP62 citations96
US6265743B1Jul 24, 2001
Trench type element isolation structure
MITSUBISHI ELECTRIC CORP26 citations92
US6127737AOct 3, 2000
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP39 citations92
US6034409AMar 7, 2000
Isolation trench having plural profile angles
MITSUBISHI ELECTRIC CORP40 citations92
US6017800AJan 25, 2000
Semiconductor device and method of fabricating thereof
MITSUBISHI ELECTRIC CORP16 citations84
US6372604B1Apr 16, 2002
Method for forming a trench type element isolation structure and trench type element isolation structure
MITSUBISHI ELECTRIC CORP13 citations74
US6323102B1Nov 27, 2001
Method of manufacturing a semiconductor device
MITSUBISHI ELECTRIC CORP12 citations74
US6150233ANov 21, 2000
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP10 citations74
US6268263B1Jul 31, 2001
Method of forming a trench type element isolation in semiconductor substrate
MITSUBISHI ELECTRIC CORP6 citations63