Inventor

AHN YO HAN

KR19 patents

⚠️ This page may combine multiple inventors who share the name “AHN YO HAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AHN YO HAN

SAMSUNG ELECTRONICS CO LTD

Chemical mechanical polishing apparatus and method of washing contaminants off of the polishing head thereof

Heat treatment equipment

Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module

Apparatus and method for cleaning air

Apparatus for guiding air current in a wafer loading chamber for chemical vapor deposition equipment

Particle counter with sampling probe having adjustable intake area

Apparatus for controlling the temperature of a wafer located at a pre-alignment stage

Module for transferring a substrate

Drive checking system for fan filter units in clean room

Driving control system and monitoring device for fan filter unit in semiconductor clean room

Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same

Air shower head of photolithography equipment for directing air towards a wafer stage

Contamination control system and air-conditioning system of a substrate processing apparatus using the same

Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath

Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same

Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same

Photolithography system and method of monitoring the same

KIM JIN-HO

Photomask cleaning apparatus and methods of cleaning a photomask using the same

LEE OK-SUN

Contamination analysis unit and method thereof, and reticle cleaning system