Inventor
BOGGS KARL
US8 patents
⚠️ This page may combine multiple inventors who share the name “BOGGS KARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
4 patentsUS7300601B2Nov 27, 2007
Passivative chemical mechanical polishing composition for copper film planarization
ADVANCED TECH MATERIALS45 citations94
US7736405B2Jun 15, 2010
Chemical mechanical polishing compositions for copper and associated materials and method of using same
ADVANCED TECH MATERIALS28 citations90
USRE46427EJun 6, 2017
Antioxidants for post-CMP cleaning formulations
ADVANCED TECH MATERIALS2 citations71
US9528078B2Dec 27, 2016
Antioxidants for post-CMP cleaning formulations
ADVANCED TECH MATERIALS4 citations71