Inventor
KWONG GARRY K
US8 patents
⚠️ This page may combine multiple inventors who share the name “KWONG GARRY K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS9721757B2Aug 1, 2017
Elongated capacitively coupled plasma source for high temperature low pressure environments
APPLIED MATERIALS INC3 citations72
US10197385B2Feb 5, 2019
Intelligent hardstop for gap detection and control mechanism
APPLIED MATERIALS INC3 citations71
US10273578B2Apr 30, 2019
Top lamp module for carousel deposition chamber
APPLIED MATERIALS INC1 citations61
US9663859B2May 30, 2017
Intelligent hardstop for gap detection and control mechanism
APPLIED MATERIALS INC0 citations51
US10959294B2Mar 23, 2021
High temperature heater for processing chamber
APPLIED MATERIALS INC0 citations50
US12577663B2Mar 17, 2026
Ampoule for a semiconductor manufacturing precursor
APPLIED MATERIALS INC0 citations47