Inventor
FISHER ALEXANDER JOHN
US9 patents
Patents
9 patentsUS11446711B2Sep 20, 2022
Steam treatment stations for chemical mechanical polishing system
APPLIED MATERIALS INC8 citations85
US11633833B2Apr 25, 2023
Use of steam for pre-heating of CMP components
APPLIED MATERIALS INC3 citations72
US11077536B2Aug 3, 2021
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC2 citations71
US10967483B2Apr 6, 2021
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC2 citations71
US12459011B2Nov 4, 2025
Steam treatment stations for chemical mechanical polishing system
APPLIED MATERIALS INC0 citations62
US12030093B2Jul 9, 2024
Steam treatment stations for chemical mechanical polishing system
APPLIED MATERIALS INC0 citations62
US11628478B2Apr 18, 2023
Steam cleaning of CMP components
APPLIED MATERIALS INC0 citations62
US11986926B2May 21, 2024
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC0 citations61
US11806835B2Nov 7, 2023
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC0 citations61