Inventor
CHIN SHU-CHENG
TW15 patents
Patents
15 patentsUS11742290B2Aug 29, 2023
Interconnect structure and method of forming thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12315764B2May 27, 2025
Conductive structures with barriers and liners of varying thicknesses
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12255144B2Mar 18, 2025
Graphene liners and caps for semiconductor structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12394717B2Aug 19, 2025
Graphite-based interconnects and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12354958B2Jul 8, 2025
Semiconductor devices and methods of formation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12322649B2Jun 3, 2025
Interconnect structure of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12237261B2Feb 25, 2025
Semiconductor device having a contact structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11996361B2May 28, 2024
Method of making a contact structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11652044B2May 16, 2023
Contact structure and method of making
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12469745B2Nov 11, 2025
Conductive structures with bottom-less barriers and liners
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12334397B2Jun 17, 2025
Interconnect structure including graphite and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12165975B2Dec 10, 2024
Method of forming interconnect structure having a barrier layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12094770B2Sep 17, 2024
Ruthenium-based liner for a copper interconnect
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11749604B2Sep 5, 2023
Ruthenium oxide film and ruthenium liner for low-resistance copper interconnects in a device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12557631B2Feb 17, 2026
Low-resistance copper interconnects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51