Inventor
KUSUMOTO NAOTO
JP236 patents
⚠️ This page may combine multiple inventors who share the name “KUSUMOTO NAOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
47 patentsUS6847064B2Jan 25, 2005
Semiconductor device having a thin film transistor
SEMICONDUCTOR ENERGY LAB122 citations99
US6756258B2Jun 29, 2004
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB163 citations99
US6528359B2Mar 4, 2003
Laser annealing method and laser annealing device
SEMICONDUCTOR ENERGY LAB135 citations99
US6335213B1Jan 1, 2002
Electro-optical device and thin film transistor and method for forming the same
SEMICONDUCTOR ENERGY LAB140 citations99
US6265745B1Jul 24, 2001
Method for producing insulated gate thin film semiconductor device
SEMICONDUCTOR ENERGY LAB96 citations99
US6242291B1Jun 5, 2001
Laser annealing method and laser annealing device
SEMICONDUCTOR ENERGY LAB180 citations99
US6242292B1Jun 5, 2001
Method of producing a semiconductor device with overlapped scanned linear lasers
SEMICONDUCTOR ENERGY LAB127 citations99
US6215595B1Apr 10, 2001
Apparatus and method for laser radiation
SEMICONDUCTOR ENERGY LAB100 citations99
US6204099B1Mar 20, 2001
Method for producing insulated gate thin film semiconductor device
SEMICONDUCTOR ENERGY LAB139 citations99
US6166399ADec 26, 2000
Active matrix device including thin film transistors
SEMICONDUCTOR ENERGY LAB129 citations99
US6124155ASep 26, 2000
Electro-optical device and thin film transistor and method for forming the same
SEMICONDUCTOR ENERGY LAB141 citations99
US6027960AFeb 22, 2000
Laser annealing method and laser annealing device
SEMICONDUCTOR ENERGY LAB146 citations99
US5959779ASep 28, 1999
Laser irradiation apparatus
SEMICONDUCTOR ENERGY LAB158 citations99
US5900980AMay 4, 1999
Apparatus and method for laser radiation
SEMICONDUCTOR ENERGY LAB169 citations99
US5861337AJan 19, 1999
Method for annealing a semiconductor
SEMICONDUCTOR ENERGY LAB99 citations99
US5815494ASep 29, 1998
Laser irradiation apparatus and laser irradiation method
SEMICONDUCTOR ENERGY LAB160 citations99
US5811328ASep 22, 1998
Electro-optical device and thin film transistor and method forming the same
SEMICONDUCTOR ENERGY LAB154 citations99
US5712191AJan 27, 1998
Method for producing semiconductor device
SEMICONDUCTOR ENERGY LAB397 citations99
US5656825AAug 12, 1997
Thin film transistor having crystalline semiconductor layer obtained by irradiation
SEMICONDUCTOR ENERGY LAB298 citations99
US5648662AJul 15, 1997
Electro-optical device with amorphous and crystalline shift registers
SEMICONDUCTOR ENERGY LAB257 citations99
US5578520ANov 26, 1996
Method for annealing a semiconductor
SEMICONDUCTOR ENERGY LAB135 citations99
US5352291AOct 4, 1994
Method of annealing a semiconductor
SEMICONDUCTOR ENERGY LAB260 citations99
US5313076AMay 17, 1994
Thin film transistor and semiconductor device including a laser crystallized semiconductor
SEMICONDUCTOR ENERGY LAB309 citations99
US7507991B2Mar 24, 2009
Electro-optical device and thin film transistor and method for forming the same
SEMICONDUCTOR ENERGY LAB53 citations98
US7335951B2Feb 26, 2008
Semiconductor device and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB68 citations98
US6562672B2May 13, 2003
Semiconductor material and method for forming the same and thin film transistor
SEMICONDUCTOR ENERGY LAB83 citations98
US6524977B1Feb 25, 2003
Method of laser annealing using linear beam having quasi-trapezoidal energy profile for increased depth of focus
SEMICONDUCTOR ENERGY LAB108 citations98
US6455359B1Sep 24, 2002
Laser-irradiation method and laser-irradiation device
SEMICONDUCTOR ENERGY LAB100 citations98
US6444506B1Sep 3, 2002
Method of manufacturing silicon thin film devices using laser annealing in a hydrogen mixture gas followed by nitride formation
SEMICONDUCTOR ENERGY LAB114 citations98
US6337232B1Jan 8, 2002
Method of fabrication of a crystalline silicon thin film semiconductor with a thin channel region
SEMICONDUCTOR ENERGY LAB83 citations98
US6271066B1Aug 7, 2001
Semiconductor material and method for forming the same and thin film transistor
SEMICONDUCTOR ENERGY LAB108 citations98
US5962869AOct 5, 1999
Semiconductor material and method for forming the same and thin film transistor
SEMICONDUCTOR ENERGY LAB98 citations98
US5956581ASep 21, 1999
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB116 citations98
US5937282AAug 10, 1999
Method for producing semiconductor device
SEMICONDUCTOR ENERGY LAB113 citations98
US6157492ADec 5, 2000
Apparatus and method for laser radiation
SEMICONDUCTOR ENERGY LAB70 citations97
US7667310B2Feb 23, 2010
Paper including semiconductor device and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB39 citations96
US7180197B2Feb 20, 2007
Semiconductor device containing stacked semiconductor chips and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB43 citations96
US6881615B2Apr 19, 2005
Method for crystallizing semiconductor material without exposing it to air
SEMICONDUCTOR ENERGY LAB37 citations96
US6709905B2Mar 23, 2004
Method for producing insulated gate thin film semiconductor device
SEMICONDUCTOR ENERGY LAB44 citations96
US6599790B1Jul 29, 2003
Laser-irradiation method and laser-irradiation device
SEMICONDUCTOR ENERGY LAB63 citations96
US6596613B1Jul 22, 2003
Laser annealing method
SEMICONDUCTOR ENERGY LAB38 citations96
US6587277B2Jul 1, 2003
Apparatus and method for laser radiation
SEMICONDUCTOR ENERGY LAB31 citations96
US6576534B1Jun 10, 2003
Method for forming a semiconductor
SEMICONDUCTOR ENERGY LAB44 citations96
US6558991B2May 6, 2003
Laser irradiation apparatus and laser irradiation method
SEMICONDUCTOR ENERGY LAB66 citations96
US6479329B2Nov 12, 2002
Method for producing semiconductor device
SEMICONDUCTOR ENERGY LAB48 citations96
US6423586B1Jul 23, 2002
Method for crystallizing semiconductor material without exposing it to air
SEMICONDUCTOR ENERGY LAB64 citations96
US6388812B2May 14, 2002
Apparatus and method for laser radiation
SEMICONDUCTOR ENERGY LAB53 citations96
SEMICONDUCTOR ENERGY LAB CO IN
1 patentSEMICONDUTOR ENERGY LAB CO LTD
1 patent(unassigned)
1 patentShowing the top 50 of 236 patents by PatentIndex Score.