Inventor
ZHOU HAIFENG
US26 patents
⚠️ This page may combine multiple inventors who share the name “ZHOU HAIFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHANGHAI HUALI MICROELECT CORP
8 patentsUS9583620B2Feb 28, 2017
Shaped cavity for SiGe filling material
SHANGHAI HUALI MICROELECT CORP3 citations73
US9331147B1May 3, 2016
Methods and systems for using conformal filling layers to improve device surface uniformity
SHANGHAI HUALI MICROELECT CORP6 citations73
US10332979B2Jun 25, 2019
Methods and systems for reducing dislocation defects in high concentration epitaxy processes
SHANGHAI HUALI MICROELECT CORP2 citations71
US10651285B2May 12, 2020
Method for avoiding IL regrown in a HKMG process
SHANGHAI HUALI MICROELECT CORP1 citations61
US10177049B2Jan 8, 2019
Embedded SiGe epitaxy test pad
SHANGHAI HUALI MICROELECT CORP0 citations52
US10008420B2Jun 26, 2018
Embedded SiGe epitaxy test pad
SHANGHAI HUALI MICROELECT CORP1 citations52
US10868144B2Dec 15, 2020
Methods and systems for reducing dislocation defects in high concentration epitaxy processes
SHANGHAI HUALI MICROELECT CORP0 citations50
US10276450B2Apr 30, 2019
Fabrication technology for metal gate
SHANGHAI HUALI MICROELECT CORP0 citations36