Inventor
LICHTEL JR RICHARD L
US4 patents
Patents
4 patentsUS4818725AApr 4, 1989
Technique for forming planarized gate structure
HARRIS CORP28 citations87
US4908683AMar 13, 1990
Technique for elimination of polysilicon stringers in direct moat field oxide structure
HARRIS CORP11 citations72
US4702000AOct 27, 1987
Technique for elimination of polysilicon stringers in direct moat field oxide structure
HARRIS CORP8 citations72
US4814285AMar 21, 1989
Method for forming planarized interconnect level using selective deposition and ion implantation
HARRIS CORP13 citations71