Inventor
LAI KEN K
US5 patents
Patents
5 patentsUS6939804B2Sep 6, 2005
Formation of composite tungsten films
APPLIED MATERIALS INC116 citations98
US7605083B2Oct 20, 2009
Formation of composite tungsten films
APPLIED MATERIALS INC39 citations95
US6328808B1Dec 11, 2001
Apparatus and method for aligning and controlling edge deposition on a substrate
APPLIED MATERIALS INC44 citations95
US7384867B2Jun 10, 2008
Formation of composite tungsten films
APPLIED MATERIALS INC16 citations92
US6186092B1Feb 13, 2001
Apparatus and method for aligning and controlling edge deposition on a substrate
APPLIED MATERIALS INC39 citations92