Inventor
BRILL BOAZ
IL40 patents
⚠️ This page may combine multiple inventors who share the name “BRILL BOAZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVA MEASURING INSTR LTD
27 patentsUS6974962B2Dec 13, 2005
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD120 citations99
US6657736B1Dec 2, 2003
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD178 citations99
US6704920B2Mar 9, 2004
Process control for micro-lithography
NOVA MEASURING INSTR LTD101 citations98
US7477405B2Jan 13, 2009
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD25 citations96
US7760368B2Jul 20, 2010
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD10 citations93
US7626710B2Dec 1, 2009
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD8 citations93
US7495782B2Feb 24, 2009
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD12 citations93
US6650424B2Nov 18, 2003
Method and system for measuring in patterned structures
NOVA MEASURING INSTR LTD43 citations93
US7715007B2May 11, 2010
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD11 citations92
US7292341B2Nov 6, 2007
Optical system operating with variable angle of incidence
NOVA MEASURING INSTR LTD33 citations92
US7301163B2Nov 27, 2007
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD9 citations81
US8023122B2Sep 20, 2011
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD6 citations74
US7864344B1Jan 4, 2011
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD3 citations74
US7864343B2Jan 4, 2011
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD3 citations74
US7791740B2Sep 7, 2010
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD5 citations74
US8941832B2Jan 27, 2015
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD3 citations73
US8363219B2Jan 29, 2013
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD3 citations73
US7122817B2Oct 17, 2006
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD4 citations73
US7292335B2Nov 6, 2007
Optical measurements of patterned structures
NOVA MEASURING INSTR LTD7 citations66
US9785059B2Oct 10, 2017
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD1 citations63
US9184102B2Nov 10, 2015
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD2 citations63
US8964178B2Feb 24, 2015
Method and system for use in monitoring properties of patterned structures
NOVA MEASURING INSTR LTD1 citations63
US7663768B2Feb 16, 2010
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD1 citations63
US10048595B2Aug 14, 2018
Process control using non-zero order diffraction
NOVA MEASURING INSTR LTD0 citations52
US9904993B2Feb 27, 2018
Method and system for optimizing optical inspection of patterned structures
NOVA MEASURING INSTR LTD1 citations52
US8643842B2Feb 4, 2014
Method and system for use in monitoring properties of patterned structures
NOVA MEASURING INSTR LTD0 citations52
US9310192B2Apr 12, 2016
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD0 citations51
BRILL BOAZ
4 patentsUS8488128B2Jul 16, 2013
Line edge roughness measuring technique and test structure
BRILL BOAZ19 citations92
US10295329B2May 21, 2019
Monitoring system and method for verifying measurements in patterned structures
BRILL BOAZ3 citations70
US8658982B2Feb 25, 2014
Optical method and system utilizing operating with deep or vacuum UV spectra
BRILL BOAZ2 citations52
US9568872B2Feb 14, 2017
Process control using non-zero order diffraction
BRILL BOAZ0 citations51