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Inventor
FU TZY-TZAN
TW
3 patents
⚠️ This page may combine multiple inventors who share the name “FU TZY-TZAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US6596576B2
Jul 22, 2003
Limiting hydrogen ion diffusion using multiple layers of SiO2 and Si3N4
APPLIED MATERIALS INC
56 citations
90
US6534424B2
Mar 18, 2003
Method of forming silicon nitride on a substrate
APPLIED MATERIALS INC
8 citations
66
(unassigned)
1 patent
US6566183B1
May 20, 2003
Method of making a transistor, in particular spacers of the transistor
9 citations
71