Inventor
CRANK SUE E
US6 patents
Patents
6 patentsUS5316974AMay 31, 1994
Integrated circuit copper metallization process using a lift-off seed layer and a thick-plated conductor layer
TEXAS INSTRUMENTS INC170 citations96
US4874723AOct 17, 1989
Selective etching of tungsten by remote and in situ plasma generation
TEXAS INSTRUMENTS INC27 citations92
US4849067AJul 18, 1989
Method for etching tungsten
TEXAS INSTRUMENTS INC27 citations92
US7355255B2Apr 8, 2008
Nickel silicide including indium and a method of manufacture therefor
TEXAS INSTRUMENTS INC17 citations90
US7029967B2Apr 18, 2006
Silicide method for CMOS integrated circuits
TEXAS INSTRUMENTS INC7 citations73
US4863558ASep 5, 1989
Method for etching tungsten
TEXAS INSTRUMENTS INC10 citations73