Inventor

WORSHAM BINET A

US3 patents

Patents

3 patents

US7307025B1Dec 11, 2007

Lag control

LAM RES CORP26 citations91

US7789991B1Sep 7, 2010

Lag control

LAM RES CORP4 citations61

US7442649B2Oct 28, 2008

Etch with photoresist mask

LAM RES CORP3 citations61