Inventor

TOMPKINS JR CHARLES R

US3 patents

Patents

3 patents

US6164633ADec 26, 2000

Multiple size wafer vacuum chuck

IBM112 citations93

US6674297B1Jan 6, 2004

Micro compliant interconnect apparatus for integrated circuit devices

IBM20 citations90

US6011627AJan 4, 2000

Universal mapping tool

IBM21 citations89