Inventor
JUNG MYOUNG-HO
KR4 patents
Patents
4 patentsUS7335455B2Feb 26, 2008
Method of forming an underlayer of a bi-layer resist film and method of fabricating a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD3 citations61
US7842451B2Nov 30, 2010
Method of forming pattern
SAMSUNG ELECTRONICS CO LTD0 citations50
US7575855B2Aug 18, 2009
Method of forming pattern
SAMSUNG ELECTRONICS CO LTD0 citations50
US7723702B2May 25, 2010
E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same
SAMSUNG ELECTRONICS CO LTD0 citations46