P

Inventor

JEONG IN KWON

US50 patents
⚠️ This page may combine multiple inventors who share the name “JEONG IN KWON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ORIOL INC

12 patents
US6905398B2Jun 14, 2005

Chemical mechanical polishing tool, apparatus and method

ORIOL INC34 citations93
US6586336B2Jul 1, 2003

Chemical-mechanical-polishing station

ORIOL INC24 citations93
US6561881B2May 13, 2003

System and method for chemical mechanical polishing using multiple small polishing pads

ORIOL INC23 citations93
US6835118B2Dec 28, 2004

Rigid plate assembly with polishing pad and method of using

ORIOL INC24 citations91
US7225864B2Jun 5, 2007

Multi-channel temperature control system for semiconductor processing facilities

ORIOL INC8 citations74
US7186165B2Mar 6, 2007

Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers

ORIOL INC8 citations74
US7104867B2Sep 12, 2006

Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers

ORIOL INC8 citations74
US7004815B2Feb 28, 2006

Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers

ORIOL INC10 citations74
US6949177B2Sep 27, 2005

System and method for processing semiconductor wafers using different wafer processes

ORIOL INC9 citations74
US6949466B2Sep 27, 2005

CMP apparatus and method for polishing multiple semiconductor wafers on a single polishing pad using multiple slurry delivery lines

ORIOL INC11 citations74
US6942545B2Sep 13, 2005

Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers

ORIOL INC9 citations74
US6575818B2Jun 10, 2003

Apparatus and method for polishing multiple semiconductor wafers in parallel

ORIOL INC12 citations74

LG ELECTRONICS INC

9 patents

SAMSUNG ELECTRONICS CO LTD

9 patents

LG INNOTEK CO LTD

8 patents

INOPLA INC

5 patents

KOMICO TECHNOLOGY INC

3 patents

KIM YONG BAE

2 patents

JEONG IN KWON

2 patents