Inventor
YANG CHIN-SHIEN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “YANG CHIN-SHIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS6030508AFeb 29, 2000
Sputter etching chamber having a gas baffle with improved uniformity
TAIWAN SEMICONDUCTOR MFG24 citations89
US5886356AMar 23, 1999
Automatic supervision system on the ion beam map for ion implantation process
TAIWAN SEMICONDUCTOR MFG10 citations68
US5859437AJan 12, 1999
Intelligent supervision system with expert system for ion implantation process
TAIWAN SEMICONDUCTOR MFG10 citations68
US6942764B1Sep 13, 2005
Arc-sprayed shield for pre-sputter etching chamber
TAIWAN SEMICONDUCTOR MFG5 citations60
US6342135B1Jan 29, 2002
Sputter etching chamber with improved uniformity
TAIWAN SEMICONDUCTOR MFG3 citations60