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Inventor

SANDSTROM TORBJORN

SE48 patents
⚠️ This page may combine multiple inventors who share the name “SANDSTROM TORBJORN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRONIC LASER SYSTEMS AB

34 patents
US6747783B1Jun 8, 2004

Pattern generator

MICRONIC LASER SYSTEMS AB475 citations99
US6687041B1Feb 3, 2004

Pattern generator using EUV

MICRONIC LASER SYSTEMS AB477 citations99
US6504644B1Jan 7, 2003

Modulator design for pattern generator

MICRONIC LASER SYSTEMS AB129 citations99
US6428940B1Aug 6, 2002

Method for pattern generation with improved image quality

MICRONIC LASER SYSTEMS AB89 citations99
US6285488B1Sep 4, 2001

Pattern generator for avoiding stitching errors

MICRONIC LASER SYSTEMS AB294 citations99
US7444616B2Oct 28, 2008

Method for error reduction in lithography

MICRONIC LASER SYSTEMS AB56 citations97
US6399261B1Jun 4, 2002

Pattern generator with improved precision

MICRONIC LASER SYSTEMS AB58 citations97
US6373619B1Apr 16, 2002

Pattern generator with improved address resolution

MICRONIC LASER SYSTEMS AB62 citations97
US7710634B2May 4, 2010

Pattern generator

MICRONIC LASER SYSTEMS AB28 citations96
US7009753B2Mar 7, 2006

Pattern generator

MICRONIC LASER SYSTEMS AB20 citations96
US6883158B1Apr 19, 2005

Method for error reduction in lithography

MICRONIC LASER SYSTEMS AB130 citations96
US6717097B1Apr 6, 2004

Data path for high performance pattern generator

MICRONIC LASER SYSTEMS AB69 citations95
US7405414B2Jul 29, 2008

Method and apparatus for patterning a workpiece

MICRONIC LASER SYSTEMS AB29 citations93
US6987599B2Jan 17, 2006

Pattern generator mirror configurations

MICRONIC LASER SYSTEMS AB17 citations93
US6813058B1Nov 2, 2004

Method and apparatus for personalization of semiconductor

MICRONIC LASER SYSTEMS AB25 citations93
US6529266B1Mar 4, 2003

Device and method for flat holding of a substrate in microlithography

MICRONIC LASER SYSTEMS AB21 citations93
US7618751B2Nov 17, 2009

RET for optical maskless lithography

MICRONIC LASER SYSTEMS AB27 citations92
US7590966B2Sep 15, 2009

Data path for high performance pattern generator

MICRONIC LASER SYSTEMS AB23 citations92
US6816302B2Nov 9, 2004

Pattern generator

MICRONIC LASER SYSTEMS AB54 citations88
US7215409B2May 8, 2007

Image forming method and apparatus

MICRONIC LASER SYSTEMS AB12 citations84
US7755657B2Jul 13, 2010

Method for high precision printing of patterns

MICRONIC LASER SYSTEMS AB8 citations83
US6624878B1Sep 23, 2003

Laser writer

MICRONIC LASER SYSTEMS AB14 citations81
US6700095B2Mar 2, 2004

Pattern generation system using a spatial light modulator

MICRONIC LASER SYSTEMS AB19 citations76
US7365901B2Apr 29, 2008

Pattern generator

MICRONIC LASER SYSTEMS AB6 citations74
US7211453B2May 1, 2007

Method and apparatus for personalization of semiconductor

MICRONIC LASER SYSTEMS AB7 citations74
US7034986B2Apr 25, 2006

Pattern generator mirror configurations

MICRONIC LASER SYSTEMS AB2 citations74
US7369962B2May 6, 2008

Method and device for data integrity checking

MICRONIC LASER SYSTEMS AB8 citations72
US6448999B1Sep 10, 2002

Method for microlithographic writing with improved precision

MICRONIC LASER SYSTEMS AB9 citations65
US7808648B2Oct 5, 2010

Method and device for optical determination of physical properties of features, not much larger than the optical wavelength used, on a test sample

MICRONIC LASER SYSTEMS AB6 citations63
US7800815B2Sep 21, 2010

Pattern generator

MICRONIC LASER SYSTEMS AB0 citations63
US7787174B2Aug 31, 2010

Pattern generator

MICRONIC LASER SYSTEMS AB0 citations63
US7446857B2Nov 4, 2008

Image forming method and apparatus

MICRONIC LASER SYSTEMS AB4 citations63
US6975443B2Dec 13, 2005

Multi-beam pattern generator

MICRONIC LASER SYSTEMS AB5 citations63
US7705963B2Apr 27, 2010

Pupil improvement of incoherent imaging systems for enhanced CD linearity

MICRONIC LASER SYSTEMS AB4 citations62

Micronic Mydata AB

5 patents

SANDSTROM TORBJORN

3 patents

BIOSTAR INC

2 patents

Mycronic AB

2 patents

MICRONIC LASER SYSTEMS

1 patent

ERICSSON TELEFON AB L M

1 patent