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Inventor
SHIM HYUN KYUNG
KR
2 patents
Patents
2 patents
US8999862B1
Apr 7, 2015
Methods of fabricating nano-scale structures and nano-scale structures fabricated thereby
SK HYNIX INC
7 citations
82
US9190274B2
Nov 17, 2015
Methods of fabricating fine patterns
SK HYNIX INC
1 citations
50