Inventor

TSUDA TAKUMA

JP4 patents

⚠️ This page may combine multiple inventors who share the name “TSUDA TAKUMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

2 patents

US6499880B2Dec 31, 2002

Static pressure air bearing

NIKON CORP18 citations90

US6735867B2May 18, 2004

Method of making a static pressure air bearing

NIKON CORP5 citations71

TOTO LTD

2 patents

US7052182B2May 30, 2006

Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device

TOTO LTD17 citations89

US7189002B2Mar 13, 2007

Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device

TOTO LTD1 citations48