Inventor
TOKUSHIMA SHINOBU
JP3 patents
Patents
3 patentsUS6499880B2Dec 31, 2002
Static pressure air bearing
NIKON CORP18 citations90
US6328473B1Dec 11, 2001
Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus
NIKON CORP15 citations80
US6735867B2May 18, 2004
Method of making a static pressure air bearing
NIKON CORP5 citations71