Inventor
OKUBO YUKIHARU
JP18 patents
⚠️ This page may combine multiple inventors who share the name “OKUBO YUKIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
14 patentsUS5633755AMay 27, 1997
Projection apparatus and method
NIKON CORP144 citations98
US6670602B1Dec 30, 2003
Scanning device and scanning method
NIKON CORP21 citations92
US6566658B1May 20, 2003
Charged particle beam control element, method of fabricating charged particle beam control element, and charged beam apparatus
NIKON CORP32 citations92
US6351041B1Feb 26, 2002
Stage apparatus and inspection apparatus having stage apparatus
NIKON CORP23 citations92
US7453549B2Nov 18, 2008
Reticle protection member, reticle carrying device, exposure device and method for carrying reticle
NIKON CORP15 citations91
US6583597B2Jun 24, 2003
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same
NIKON CORP32 citations91
US6499880B2Dec 31, 2002
Static pressure air bearing
NIKON CORP18 citations90
US6900878B2May 31, 2005
Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same
NIKON CORP18 citations84
US6267131B1Jul 31, 2001
Method of controlling pressure in a chamber, apparatus for the same, and exposure apparatus
NIKON CORP17 citations82
US6328473B1Dec 11, 2001
Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus
NIKON CORP15 citations80
US6735867B2May 18, 2004
Method of making a static pressure air bearing
NIKON CORP5 citations71
US6977377B2Dec 20, 2005
Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus
NIKON CORP3 citations62
US6953944B2Oct 11, 2005
Scanning device and method including electric charge movement
NIKON CORP1 citations52
US6781123B2Aug 24, 2004
Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus
NIKON CORP0 citations52