Inventor

NOVAK W THOMAS

US84 patents

⚠️ This page may combine multiple inventors who share the name “NOVAK W THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVAK W THOMAS

NIKON CORP

Environmental system including a transport region for an immersion lithography apparatus

Wafer positioner with planar motor and mag-lev fine stage

Cleanup method for optics in immersion lithography

Kinematic lens mounting with distributed support and radial flexure

Electro-magnetic motor cooling system

Optical arrangement of autofocus elements for use with immersion lithography

Precision motion stage with single guide beam and follower stage

Environmental system including a transport region for an immersion lithography apparatus

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion lithography apparatus

Optical arrangement of autofocus elements for use with immersion lithography

Liquid jet and recovery system for immersion lithography

Run-off path to collect liquid for an immersion lithography apparatus

Adaptive-optics actuator arrays and methods for using such arrays

Low distortion kinematic reticle support

Chuck for mounting reticle to a reticle stage

Linear motor having polygonal shaped coil units

Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system

Interferometer system for a semiconductor exposure system

Cooling structure for a linear motor

Platform positionable in at least three degrees of freedom by interaction with coils

Positioning stage with stationary actuators

Static pressure air bearing

Boresight error monitor for laser radar integrated optical assembly

Environmental system including a transport region for an immersion lithography apparatus

Image apparatus with image noise compensation

Depth layer extraction and image synthesis from focus varied multiple images

Fine force actuator assembly for chemical mechanical polishing apparatuses

Kinematic mounted reference mirror with provision for stable mounting of alignment optics

Air bearing linear guide for use in a vacuum

Positioning stage with stationary and movable magnet tracks

Reticle stage with reaction force cancellation

Optical arrangement of autofocus elements for use with immersion lithography

Environmental system including a transport region for an immersion lithography apparatus

Environmental system including a transport region for an immersion lithography apparatus

Adaptive-optics actuator arrays and methods for using such arrays

Moving mechanism with high bandwidth response and low force transmissibility

MICRONIX PARTNERS

Lithography system

Lithography system

Mask loading apparatus, method and cassette

NIPPON KOGAKU KK

Precision scanning apparatus and method with fixed and movable guide members

Wafer positioner with planar motor and mag-lev fine stage

Inspection tool for testing and adjusting a projection unit of a lithography system

NIKON PRECISION INC

Dual guide beam stage mechanism with yaw control

Precision motion stage with single guide beam and follower stage

MICRONIX CORP

Multiple wavelength linear zone plate alignment apparatus and method

Coarse and fine motion positioning mechanism

NIKON CORP OF JAPAN

Armature with regular windings and having a high conductor density

NIKON CORP JAPAN

Precision scanning apparatus and method with fixed and movable guide members

KAWAI HIDEMI

Cleanup method for optics in immersion lithography supplying cleaning liquid onto a surface of object below optical element, liquid supply port and liquid recovery port