Inventor

HSIEH CHI-JEN

TW2 patents

Patents

2 patents

US9720325B2Aug 1, 2017

Photoresist coating scheme

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations65

US10115581B2Oct 30, 2018

Removal of particles on back side of wafer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations30