Inventor
HINCKLEY KIMBERLY
US4 patents
Patents
4 patentsUS9978564B2May 22, 2018
Chemical control features in wafer process equipment
APPLIED MATERIALS INC106 citations98
US9132436B2Sep 15, 2015
Chemical control features in wafer process equipment
APPLIED MATERIALS INC198 citations98
US10354843B2Jul 16, 2019
Chemical control features in wafer process equipment
APPLIED MATERIALS INC40 citations97
US11264213B2Mar 1, 2022
Chemical control features in wafer process equipment
APPLIED MATERIALS INC0 citations62