P

Inventor

HATAMURA YASUNORI

US5 patents
⚠️ This page may combine multiple inventors who share the name “HATAMURA YASUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents
US8382942B2Feb 26, 2013

Method and apparatus for reducing substrate backside deposition during processing

TOKYO ELECTRON LTD7 citations74
US6849559B2Feb 1, 2005

Method for removing photoresist and etch residues

TOKYO ELECTRON LTD10 citations72
US12341001B2Jun 24, 2025

Cleaning method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations53
US11430664B2Aug 30, 2022

Etching method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations44

TOKYO ELECTRON LTD INC

1 patent
US7344993B2Mar 18, 2008

Low-pressure removal of photoresist and etch residue

TOKYO ELECTRON LTD INC39 citations88