Inventor
HAGIWARA MASAAKI
US11 patents
⚠️ This page may combine multiple inventors who share the name “HAGIWARA MASAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7169440B2Jan 30, 2007
Method for removing photoresist and etch residues
TOKYO ELECTRON LTD38 citations92
US6737350B1May 18, 2004
Method of manufacturing semiconductor device
TOKYO ELECTRON LTD22 citations90
US6849559B2Feb 1, 2005
Method for removing photoresist and etch residues
TOKYO ELECTRON LTD10 citations72