Inventor
OSHINO TETSUYA
JP12 patents
Patents
12 patentsUS5677939AOct 14, 1997
Illuminating apparatus
NIKON CORP108 citations97
US6859337B2Feb 22, 2005
Optical-element mountings exhibiting reduced deformation of optical elements held thereby
NIKON CORP36 citations92
US6240158B1May 29, 2001
X-ray projection exposure apparatus with a position detection optical system
NIKON CORP40 citations92
US6208707B1Mar 27, 2001
X-ray projection exposure apparatus
NIKON CORP45 citations92
US6108096AAug 22, 2000
Light absorption measurement apparatus and methods
NIKON CORP43 citations92
US6069937AMay 30, 2000
Illumination apparatus
NIKON CORP20 citations92
US6909774B2Jun 21, 2005
Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems
NIKON CORP13 citations83
US6878042B2Apr 12, 2005
Devices and methods for holding an optical element with reduced stress in an optical column and while performing an out-of-column procedure on the element
NIKON CORP7 citations73
US6356616B1Mar 12, 2002
Apparatus and methods for detecting position of an object along an axis
NIKON CORP9 citations73
US6376849B1Apr 23, 2002
Charged particle beam exposure apparatus mask and charged particle beam exposure apparatus
NIKON CORP2 citations62
US6816568B2Nov 9, 2004
X-ray projection exposure device, X-ray projection exposure method, and semiconductor device
NIKON CORP1 citations51
US6218674B1Apr 17, 2001
Electron beam projection exposure apparatus
NIKON CORP1 citations51