Inventor
HICKMAN CRAIG A
US16 patents
⚠️ This page may combine multiple inventors who share the name “HICKMAN CRAIG A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
14 patentsUS7038762B2May 2, 2006
Method and apparatus for irradiating a microlithographic substrate
MICRON TECHNOLOGY INC21 citations92
US6784975B2Aug 31, 2004
Method and apparatus for irradiating a microlithographic substrate
MICRON TECHNOLOGY INC28 citations92
US6519036B1Feb 11, 2003
System for processing semiconductor products
MICRON TECHNOLOGY INC17 citations92
US7370659B2May 13, 2008
Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
MICRON TECHNOLOGY INC8 citations73
US6529274B1Mar 4, 2003
System for processing semiconductor products
MICRON TECHNOLOGY INC12 citations73
US6909984B2Jun 21, 2005
Wafer alignment system
MICRON TECHNOLOGY INC6 citations69
US8029947B2Oct 4, 2011
Systems and methods for implementing and manufacturing reticles for use in photolithography tools
MICRON TECHNOLOGY INC4 citations62
US7361234B2Apr 22, 2008
Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
MICRON TECHNOLOGY INC4 citations62
US7298453B2Nov 20, 2007
Method and apparatus for irradiating a microlithographic substrate
MICRON TECHNOLOGY INC4 citations62
US6844933B2Jan 18, 2005
System for processing semiconductor products
MICRON TECHNOLOGY INC1 citations62
US6812999B2Nov 2, 2004
Device and method of correcting exposure defects in photolithography
MICRON TECHNOLOGY INC1 citations62
US6727975B1Apr 27, 2004
Device and method of correcting exposure defects in photolithography
MICRON TECHNOLOGY INC2 citations62
US6708131B1Mar 16, 2004
Wafer alignment system
MICRON TECHNOLOGY INC4 citations58
US6967707B2Nov 22, 2005
Device and method of correcting exposure defects in photolithography
MICRON TECHNOLOGY INC0 citations51